@Article{CapoteSilvTrav:2015:EfHePr,
author = "Capote, G. and Silva, Guilherme Faria da and Trava-Airoldi,
Vladimir Jesus",
affiliation = "{Universidad Nacional de Colombia} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)}",
title = "Effect of hexane precursor diluted with argon on the adherent
diamond-like properties of carbon films on steel surfaces",
journal = "Thin Solid Films",
year = "2015",
volume = "589",
pages = "286--291",
month = "Aug.",
keywords = "Diamond-like carbon, Chemical vapor deposition, Hexane, Adhesion,
Mechanical properties, Tribological properties.",
abstract = "Various precursors of diamond-like carbon (DLC) growth have been
studied in order to find the best set of mechanical and
tribological proprieties. Gaseous hexane (C6H14) stands out as an
option because of its high vapor pressure and the fact that it
accepts dilution with other hydrocarbons or even nanoparticles,
forming convenient colloidal substances. Therefore, in the present
paper, hexane will be studied using argon as an inert additional
gas, in order to determine the mechanical and tribological
properties and microstructure of DLC films deposited via a
modified and asymmetrical bipolar pulsed-DC plasma enhanced
chemical vapor deposition system. The addition of argon to the
hexane precursor atmosphere is expected to increase the ratio of
ion to neutral radicals on the surface of the growing film without
changing the H/C ratio of the gas mixture. The film's
microstructure and the hydrogen contents were probed by means of
Raman spectroscopy. The internal stress was determined through
measurement of the change in the substrate curvature by means of a
profilometer, while nanoindentation experiments showed the
hardness of the film. The adhesion of the films was evaluated via
the scratch test. In order to overcome the low adhesion of these
films on AISI 304 stainless steel surfaces, a silicon interlayer,
obtained by using low-energy ion implantation and silane as a
precursor gas, was used. The results show that the precursor
hexane atmosphere diluted with argon induces modifications in the
properties of the films when a high quantity of argon is used. The
importance of the effect of ion bombardment during film growth on
the properties of the films was confirmed.",
doi = "10.1016/j.tsf.2015.05.047",
url = "http://dx.doi.org/10.1016/j.tsf.2015.05.047",
issn = "0040-6090",
language = "en",
targetfile = "capote_effect.pdf",
urlaccessdate = "27 abr. 2024"
}